Analisis of the Influence of Deposition Condition on the Structure of the Coatings Nb-Al-N

 

I. M. Frantsevich Institute for Problems of Materials Science of the NAS of Ukraine, Omeliana Pritsaka str.,3, Kyiv, 03142, Ukraine
"Nanomaterials: Applications and Properties", Lviv, Ukraine, September 16-23, 2015., 2015, Т.4, #1
http://www.materials.kiev.ua/article/1651

Abstract