Конференції

Structural and Mechanical Properties of Nanocomposite Nb-Al-N Films

   
А.Погребняк,
 
І.І.Тимофєєва,
 
С.Н.Дуб
 

Інститут проблем матеріалознавства ім. І. М. Францевича НАН України , вул. Кржижановського 3, Київ, 03142, Україна
Proceedings of the International Conference «Nanomaterials: Applications and Properties», Lviv, Ukraine, September 21-23, 2014., 2014, Т.3, #1
http://www.materials.kiev.ua/article/1644

Анотація

Nb-Al-N films were deposited by magnetron sputtering of the Nb and Al targets in the Ar-N2 atmosphere on silicon wafers at various currents supplied to the magnetron device with the Al target (IAl=100, 150, 200, 300 mA). The films were studied with XRD, FTIR spectroscopy, as well by nanoindentation and Knoop indentation tests. The films were found to have the nanocomposite nc-B1-NbNx/a-AlN structure and exhibit the nanohardness and Knoop hardness in the ranges of 29-33.5 GPa and 46-48 GPa, respectively. The hardness and elastic modulus has an extreme dependence on IAl


ALN ПЛІВКИ, NB-AL-N ПЛІВКИ, МАГНЕТРОННЕ РОЗПИЛЕННЯ, МЕХАНІЧНІ ВЛАСТИВОСТІ, НАНОІНДЕНТУВАННЯ, СТРУКТУРА ПЛІВКИ