ВЛИЯНИЕ СОСТАВА ГАЗОВОЙ СМЕСИ N₂-AR НА СВОЙСТВА NB –SI – NI ПЛЕНОК, ПОЛУЧЕННЫХ С ПОМОЩЬЮ ДУАЛЬНОГО МАГНЕТРОННОГО РАСПЫЛЕНИЯ

Abstract

The nanocomposite films based on Nb-Si-N have obtained by the method of dual unbalanced magnetron sputtering. It was the established that the Nb-Si-N nanocomposite films have a structure and represent a set of δ-NbN_x nanocrystals embedded in amorphous Si₃N₄ tissue (nc-δ-NbN_x / a-Si₃N₄). Investigation of the influence of the composition of the gas mixture N₂+Ar on the properties of the Nb-Si-N films showed that with increasing nitrogen flow the size of nanocrystals δ-NbN_x, counted by the formula Scherrer, decreased from 19.34 nm to 4 nm. Films become more amorphous. In addition, increasing the flow rate ratio of nitrogen and argon (k = F_N2 / F_Ar) leads to a decrease in mechanical properties ( nanohardness and elastic modulus). The film surface roughness increases. The maximum hardness and elastic modulus of the films obtained by unbalanced dual magnetron sputtering reached 35 GPa and 350 GPa, respectively. These characteristics decreased to 25 GPa and 250 GPa, respectively with increasing flow of nitrogen.