Kinetics disintegration of chromoium nanofilms deposited onto oxide materials during annealing in vacuum

Abstract

The behavior of chromium nanofilms 150 nm thickness deposited onto alumina ceramics, leucosapphire and zirconia ceramics and annealed in vacuum at temperatures up to 1100 °C for different times (5—20 min) at each temperature was studied. It was found that films onto all oxides after annealing at temperatures up to 1000 °C behave identically and preserve their integrity predominantly. With an increase in the annealing temperature up to 1100 °С, the film begins to disperse intensively. The kinetic curves of films decomposition on all oxides are constructed depending on the annealing temperature and the exposure time at each temperature.