Phase transformations in silicon under dry and lubricated sliding

 
Ю.Гогоці 2,
 
В.Домнич 2
 

1 Інститут проблем матеріалознавства ім. І. М. Францевича НАН України , вул. Омеляна Пріцака, 3, Київ, 03142, Україна
2 Drexel University, Department of Materials Engineering , Philadelphia, Pennsylvania, 19104
ankov@netzero.com

Tribology transactions, 2002, Т.45, #3
https://doi.org/10.1080/10402000208982562

Анотація

Sliding friction and wear mechanisms of silicon/silicon nitride test pairs were investigated under conditions of both dry and lubricated sliding. High-resolution surface topography mapping and electron microscopy studies revealed that microfracture was the predominant wear mechanism under dry and grease-lubricated sliding conditions. Raman spectroscopy suggested that in certain areas of the sliding contact, silicon underwent phase transformation and reached a metallic state because of high contact pressures. The extent of phase transformation was greater during the very early stages of the run-in period than during steady-state sliding regimes.
The use of grease and oil as lubricants led to a substantial reduction in friction and greatly diminished wear due to microfracture. Furthermore, almost all areas on Si surfaces subjected to lubricated sliding contact underwent pressure-induced phase transformation. Both amorphous material and crystalline Si phases were identified by Raman spectroscopy. The experimental observations suggested that the wear process in lubricated sliding contacts was mainly dominated by the formation of a ductile metallic Si phase and subsequent removal of the transformed layers.
The results of this study demonstrate that pressure-induced phase transformation must be taken into account when considering possible wear mechanisms of silicon in contact with other hard materials, inasmuch as it contributes notably to the wear of silicon under lubricated sliding.


ГРАНИЧНЕ ЗМАЩУВАННЯ, КЕРАМІКА, КРЕМНІЙ, МЕХАНІЗМ ЗНОСУ, РАМАНІВСЬКА СПЕКТРОСКОПІЯ, ФАЗОВЕ ПЕРЕТВОРЕННЯ

Посилання

  1. Bhushan , B. and Li , X. ( 1997 ), “ Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices ,” Jour. Muter. Res. , 12 , 1 , pp 54 – 63  [Crossref][Web of Science ®][Google Scholar]
  2. Blackley , W. S. and Scattergood , R. O. ( 1994 ), “ Chip Topography for Ductile-Regime Machining of Germanium ,” Jour. Eng. Ind. , 116 , pp 263 – 266  [Crossref][Web of Science ®][Google Scholar]
  3. Blake , P. N. and Scattergood , R. O. ( 1990 ), “ Ductile-Regime Machining of Germanium and Silicon. ” Jour. Am. Ceram. Soc , 73 , pp 949 – 957  [Crossref][Web of Science ®][Google Scholar]
  4. Bradby , J. E. , Williams , J. S. , Wong-Leung , J. , Swain , M. V. and Munroe , P. ( 2001 ), “ Mechanical Deformation in Silicon by Micro-Indentation ,” Jour. Mater. Res. , 16 , 5 , pp 1500 – 1507  [Google Scholar]
  5. Callahan , D. L. and Morris , J. C. ( 1992 ). “ The Extent of Phase Transformation in Silicon Hardness Indentations ,” Jour. Mater. Res. , 7 , 7 , pp 1614 – 1617  [Google Scholar]
  6. Clarke , D. R. , Kroll , M. C. , Kirchner , P. D. , Cook , R. F. and Hockey , B. J. ( 1988 ), “ Amorphization and Resistance of Silicon and Germanium Induced by Indentation ,” Phys. Rev. Lett. , 60 , 21 , pp 2156 – 2159  [Crossref][Google Scholar]
  7. Danyluk , S. , Lee , S. W. , Ahn , J. H. and Kahn , A. ( 1988 ), “ Resistivity of Linear Scratches in Doped (100) n -Type Single-Crystal Silicon.” your. Appl. Phys. , 63 , pp 4569 – 4571  [Google Scholar]
  8. Domnich , V. and Gogotsi , Y. ( 2001a ), “ Chapter 5: High-Pressure Surface Science. ” Handbook of Sulfates and Interfaces of Materials , Academic Press , Nalwa , H. S. , ed., pp 195 – 237  [Google Scholar]
  9. Domnich , V. and Gogotsi , Y. ( 2001b ), “ Pressure-Induced Phase Transformations in Semiconductors under Contact Loading ,” Frontiers of High-Pressure Research II: Application of High Pressure to Low Dimensional Novel Electronic Materials , Kluwer Academic Publishers , Dordrecht , N. L. , Hochheimer , H. D. , Kuchta , B. , Dorhout , P. K. and Yarger , J. L. , eds., pp 291 – 302  [Google Scholar]
  10. Domnich , V. , Gogotsi , Y. and Dub , S. ( 2000 ), “ Effect of Phase Transformations on the Shape of the Unloading Curve in the Nanoindentation of Silicon. ” Appl. Phys. Lett. , 76 , 16 , pp 2214 – 2216  [Crossref][Google Scholar]
  11. George , A. ( 1999 ), “ High Pressure Phases of c-Si ,” Properties of Crystalline Silicon, INSPEC , the Institution of Electrical Engineers , London , Hull , R. , ed., pp 104 – 107  [Google Scholar]
  12. Gogotsi , Y. , Baek , C. and Kirscht , F. ( 1999 ), “ Raman Microspectroscopy Study of Processing-Induced Phase Transformations and Residual Stress in Silicon ,” Semicond. Sci. Tech. , 14 , 10 , pp 936 – 944  [Crossref][Google Scholar]
  13. Gogotsi , Y. , Zhou , G. , Ku , S. S. and Cetinkunt , S. ( 2001 ), “ Raman Microspectroscopy Analysis of Pressure-Induced Metallization in Scratching of Silicon ,” Semicond. Sci. Tech. , 16 , 5 , pp 345 – 352  [Google Scholar]
  14. Gogotsi , Y. G. , Domnich , V. , Dub , S. N. , Kailer , A. and Nickel , K. G. ( 2000 ), “ Cyclic Nanoindentation and Raman Microspectroscopy Study of Phase Transformations in Semiconductors ,” Jour. Mater. Res. , 15 , 3 , pp 871 – 879  [Google Scholar]
  15. Gogotsi , Y. G. , Kailer , A. and Nickel , K. G. ( 1997 ), “ Phase Transformations in Materials Studied by Micro-Raman Spectroscopy of Indentations ,” Mater. Res. Innov. , 1 , 1 , pp 3 – 9  [Taylor & Francis Online][Google Scholar]
  16. Gridneva , I. V. , Milman , Y. V. and Trefilov , V. I. ( 1972 ), “ Phase Transition in Diamond-Structure Crystals During Hardness Measurements ,” Phys. Stat. Sol. (a) , 9 , 14 , pp 177 – 182  [Google Scholar]
  17. Gupta , M. C. and Ruoff , A. L. ( 1980 ), “ Static Compression of Silicon in the [100] and In The [111] Directions ,” Jour. Appl. Phys. , 51 , 2 , pp 1072 – 1075  [Google Scholar]
  18. Hamilton , G. M. and Goodman. L. E. ( 1966 ). “ The Stress Field Created by a Circular Sliding Contact.” your. Appl. Mech. , 33 , pp 371 – 376  [Crossref][Web of Science ®][Google Scholar]
  19. Hanfland , M. and Syassen , K. ( 1990 ), “ Raman Modes of Metastable Phases of Si and Ge. ” High Pressure Res. , 3 , pp 242 – 244  [Taylor & Francis Online][Google Scholar]
  20. Kailer , A. , Gogotsi , Y. G. and Nickel , K. G. ( 1997 ), “ Phase Transformations of Silicon Caused by Contact Loading ,” Jour. Appl. Phys. , 81 , 7 , pp 3057 – 3063  [Crossref][Google Scholar]
  21. Kim , S. H. and Danyluk , S. ( 1990 ), “ 4-Point Probe Resistivity Measurements of Dicing Damage in (100) and (111) Single-Crystal Silicon Wafer ,” Jour. Mater. Sci. , 25 , 11 , pp 4892 – 4897  [Google Scholar]
  22. Li , Y. and Danyluk , S. ( 1996 ), “ Dynamic Measurements of Damage Generation in Single Crystal Silicon Due to Sliding Contact with a Spherical Diamond ,” Wear. 200 , pp 238 – 243  [Google Scholar]
  23. Maley , N. , Beeman , D. and Lannin , J. S. ( 1988 ), “ Dynamics of Tetrahedral Networks: Amorphous Si and Ge ,” Phys. Rev. B , 38 , 15 , pp 10611 – 10622  [Crossref][Google Scholar]
  24. Minowa , K. and Sumino , K. ( 1992 ), “ Stress-Induced Amorphization of a Silicon Crystal by Mechanical Scratching ,” Phys. Rev. Lett. , 69 , 2 , pp 320 – 322  [Crossref][Google Scholar]
  25. Mishina , H. ( 1988 ), “ Friction and Wear of Semiconductors in Sliding Contact with Pure Metals ,” Trib. Int. , 21 , 2 , pp 76 – 82  [Crossref][Google Scholar]
  26. Morris , J. C. and Callahan , D. L. ( 1994 ), “ Origins of Microplasticity in Low-Load Scratching of Silicon ,” Jour. Mater. Res. , 9 , pp 2907 – 2913  [Crossref][Google Scholar]
  27. Olijnyk , H. and Jephcoat , A. P. ( 1999 ). “ Effect of Pressure on Raman Spectra of Metastable Phases of Si and Ge ,” Phys. Stat. Sol. (b) , 211 , pp 413 – 420  [Google Scholar]
  28. Park , D.-S. , Danyluk , S. and McNallan , M. J. ( 1991 ), “ Friction and Wear of Single-Crystal Silicon al Elevated Temperatures. ” Jour. Miller. Sci. , 26 , pp 1505 – 1511  [Google Scholar]
  29. Pharr , C. M. , Oliver , W. C. Cook , R. F. , Kirchner , P. D. , Kroll , M. C. , Dinger , T. R. and Clarke , D. R. ( 1992 ), “ Electrical Resistance of Metallic Contacts on Silicon and Germanium During Indentation ,” Jour. Mater. Res. 7 , pp 961 – 972  [Google Scholar]
  30. Roberts , S. G. ( 1999 ), “ Fracture and Brittle-Ductile Transition in Si ,” Properties of Crystalline Silicon. INSPEC, the Institution of Electrical Engineers, London, Hull , R. , ed., pp 144 – 148  [Google Scholar]
  31. Scott , C. G. and Danyluk , S. ( 1992 ). “ Examination of Silicon Wear Debris Generated in a Linear Scratch Test. ” Wear. 152 , pp 183 – 185  [Google Scholar]
  32. Tanikella , B. N. , Somasekhar , A. H. , Sowers , A. T. , Nemanich , R. J. and Scattergood , R. O. ( 1996 ). “ Phase Transformations During Microcutting Tests on Silicon. ” Appl Phys. Lett. , 69 , 19 , pp 2870 – 2872  [Google Scholar]
  33. Weppelmann , E. R. , Field , J. S. and Swain , M. V. ( 1993 ). “ Observation, Analysis and Simulation of the Hysteresis of Silicon Using Ultra-Micro-Indentation with Spherical Indenters ,” Jour. Mater. Res. , 8 , pp 830 – 840  [Crossref][Web of Science ®][Google Scholar]
  34. Zanoria , E. and Danytuk , S. ( 1993 ). “ Ball-On-Flat Reciprocating Sliding Wear of Single-Crystal, Semiconductor Silicon at Room Temperature. ” Wear , 162–164 , pp 332 – 338  [Crossref][Google Scholar]
  35. Zanoria , E. , Danyluk , S. and McNallan , M. ( 1995a ), “ Effects of Length, Diameter and Population Density of Tribological Rolls on Friction between Self-Mated Silicon ,” Wear , 181–183 , pp 784 – 789  [Google Scholar]
  36. Zanoria , E. S. , Danyluk , S. and McNallan , M. J. ( 1995b ). “ Formation of Cylindrical Sliding-Wear Debris on Silicon in Humid Conditions and Elevated Temperatures ,” Trib. Trans. , 38 , 3 , pp 721 – 727  [Taylor & Francis Online][Web of Science ®][Google Scholar]