Comparative studies of plasma-chemical coating Si-C-N, obtained from different precursors

Abstract

Comparative analysis of physical and tribological properties of PECVD SiCN films deposited using different precursors, namely, methyltrichlorosilane MTCS) and hexamethyldisilane (GMDS) is performed. An influence of precursor nature on phase composition, character of interatomic interaction, and tribological properties are analyzed. The wear resistance, friction coefficient, adhesion, and roughness of SiCN films are investigated using ball-on-plane and scratch tests. As shown, the film structure (nanostructure of MTCS films and amorphous structure of GMDS films) essentially influences wear resistance of SiCN coatings. As revealed, the amorphous GMDS films possess twice-lower wear resistance as compared to that of nanocrystalline MTCS films. Investigation of vibrational bonds in the films (that is based on the analysis of infrared absorption spectra–FTIR) shows that strengthening of Si—C bonds in films correlates with their tribological properties. As supposed, the presence of chlorine in MTCS films influences on reduction of surface roughness and friction coefficient.