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Micromicanical sistems in medicine

V.N.Shoffa,
 
E.G.Bandorina
 

Electrical Contacts and Electrodes - Kiev: Frantsevich Institute for Problems of Materials Science NASU, 2016, #13
http://www.materials.kiev.ua/article/2342

Abstract

An overview of MEMS and bioMEMS, their applications, designs, development of micromirrors, and the results of analytical calculation and calculation in the program COMSOL Multiphysics,micromirror with thermal actuatoris given.


BIMETALLIC STRIP, BIOMEMS, MEMS, MICROMIRROR, MICROSYSTEMTECHNOLOGY, THERMAL ACTUATOR

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