Structural and Mechanical Properties of TiN/BCN Coatings

 
A.I.Kuzmichev,
   
I.Timofeeva,
 
O.Butenko,
   
S.N.Dub
 

I. M. Frantsevich Institute for Problems of Materials Science of the NAS of Ukraine, Krzhizhanovsky str., 3, Kyiv, 03142, Ukraine
Powder Metallurgy - Kiev: Frantsevich Institute for Problems of Materials Science NASU, 2013, #01/02
http://www.materials.kiev.ua/article/914

Abstract

Monolayer TiN and a-BCN and nanolayered TiN/BСN coatings are deposited by dual magnetron sputtering. The effect of discharge power, flow rates of gases, and substrate bias on the mechanical properties of the deposited nanolayered coatings is studied. The structure, chemical bonding, mechanical properties, adhesion, and friction coefficient are analyzed. It is established that the deposited nanolayered coatings have nc-TiNx/a-BNO+a-C structure. The Knoop hardness of the nanolayered TiN/BСN coatings is found to reach 45 GPa on average. The nanohardness is lower than the Knoop hardness (by ~20–30%). The deposited nanolayered coatings can be recommended as wear-resistant and protective coatings for mechanical engineering.


ADHESION, FRICTION COEFFICIENT, MAGNETRON SPUTTERING, MECHANICAL PROPERTIES, NANOLAYERED COATING, WEAR-RESISTANT COATING