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Microelectromechanical switches

S.M.Karabanov,
 
V.N.Shoffa
 

Electrical Contacts and Electrodes - Kiev: Frantsevich Institute for Problems of Materials Science NASU, 2012, #11
http://www.materials.kiev.ua/article/1114

Abstract

The information about micro-switches produced using micro- and nanotechnologies (examples of designs, specifications, contact materials used, values of the contact force and contact breaking force) is given; the authors/ opinions about the specifications stability and yield ration percentage are expressed. Full text download


CONTACT FORCE, CONTACT RESISTANCE, MICROELECTROMECHANICAL SWITCH, MICROMECHANICAL TECHNIQUE, PASSIVATION

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