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Properties, structure, methods of obtaining of the indium oxide based materials and their practical use in the semiconductor and electronic technique (Reviev)

N.Grigorenko,
 
E.Chernigovtcev
 

I. M. Frantsevich Institute for Problems of Materials Science of the NAS of Ukraine, Omeliana Pritsaka str.,3, Kyiv, 03142, Ukraine
Adhesion of Melts and Brazing of Materials - Kiev: Frantsevich Institute for Problems of Materials Science NASU, 2019, #52
http://www.materials.kiev.ua/article/2875

Abstract

Review of literary data concerning general properties and structure of indium oxide (In2O3) and the analysis of methods of obtaining of the indium oxide based materials is presented and their use in different fields of electronic technique is examined.


INDIUM OXIDE, MICROELECTRONIC DEVICE, PHYSICAL PROPERTIES, SEMICONDUCTOR, TRANSPARENT CONDUCTING LAYERS

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