ВИКОРИСТАННЯ ЕЛЕКТРОННО-ПРОМЕНЕВОГО МЕТОДУ ОБРОБКИ ДЛЯ ВІДШАРУВАННЯ ПЛАСТИН МАЛОЇ ТОВЩИНИ З ПОВЕРХНІ ОПТИЧНОГО МАТЕРІАЛУ

G.V.KANASHEVYCH,

V.I.UNROD,

M.V.HOLUB,

S.M.MATSEPA,

YU.I.KOVALENKO,

E.V.KHYZHNIAK

Bulletin of the Ukrainian Material Science Society of I.M. Frantsevich - Kiev: Frantsevich Institute for Problems of Materials Science NASU, 2019, #12
http://www.materials.kiev.ua/article/2946

Abstract

The article presents the results of research on the heat treatment of low-energy electrons (electron energy E≤6 keV) of a surface of silica glass in a vacuum, in which the surface layer is melting. Under certain conditions of treatment there is a detachment of the surface in the form of plates in the thickness of 0.1...1.2 mm. The exfoliated surface is characterized by improved chemical homogeneity, improved residual nanorelief, variable refractive index. Such plates have a perspective for use in the micro-optics (MO), integrated optics (IO) and fiber optics (FO).

ELECTRON BEAM MICROPROCESSING OF GLASS, ELECTRONIC FLOW, FO, GLASS SURFACE, IO, MO, OPTICAL GLASS, SMALL THICKNESS PLATES, SURFACE LAYER OF GLASS

ВИКОРИСТАННЯ ЕЛЕКТРОННО-ПРОМЕНЕВОГО МЕТОДУ ОБРОБКИ ДЛЯ ВІДШАРУВАННЯ ПЛАСТИН МАЛОЇ ТОВЩИНИ З ПОВЕРХНІ ОПТИЧНОГО МАТЕРІАЛУ

G.V.KANASHEVYCH, V.I.UNROD, M.V.HOLUB, S.M.MATSEPA, YU.I.KOVALENKO, E.V.KHYZHNIAK

Abstract

Publications

G.V.KANASHEVYCH,

V.I.UNROD,

M.V.HOLUB,

S.M.MATSEPA,

YU.I.KOVALENKO,

E.V.KHYZHNIAK